deposition equipment meaning in Chinese

沉积设备

Cvd chemical vapor deposition equipment
化学气相沉积法设备
In this paper , the properties of diamond is summarized at first , then the mechanism of chemical vapor deposition ( cvd ) for synthesizing diamond film is introduced and some common techniques of the cvd are commented . among these common techniques , electron aided cvd ( eacvd ) is seleceted for develepment of diamond film deposition equipment in this study , because of its high efficiency and low cost
本文首先对金刚石的性质进行概述，然后介绍了化学气相沉积法( cvd )生长金刚石膜的原理，接着对几种常见的cvd法进行比较和评述，由于eacvd法具有高效、低成本的特点，因此在这几种方法中选择eacvd法作为本课题设备生长金刚石膜的方法。